2/4/10	3:21:25 PM	Program started after a nonstandard shutdown
2/4/10	3:21:26 PM	Helium valve closed
2/4/10	3:21:26 PM	H2 valve closed
2/4/10	3:21:26 PM	BCl3 valve closed
2/4/10	3:21:26 PM	PH3 valve closed
2/4/10	3:21:26 PM	SiCl4 pre valve closed
2/4/10	3:21:26 PM	SiCl4 post valve closed
2/4/10	3:21:26 PM	Main Vac valve closed
2/4/10	3:21:26 PM	Bubbler valve closed
2/4/10	3:21:26 PM	Bypass valve opened
2/4/10	3:21:26 PM	Helium MFC set to  0.000000
2/4/10	3:21:26 PM	H2 MFC set to  0.000000
2/4/10	3:21:26 PM	BCl3 MFC set to  0.000000
2/4/10	3:21:26 PM	PHl3 MFC set to  0.000000
2/4/10	3:21:26 PM	SiCl4 MFC set to  0.000000
2/4/10	3:21:26 PM	Bypass solenoid MFC set to  760.000000
2/4/10	3:21:26 PM	Tube furnace set to 0
2/4/10	3:25:17 PM	Program started after a nonstandard shutdown
2/4/10	3:25:17 PM	Helium valve closed
2/4/10	3:25:18 PM	H2 valve closed
2/4/10	3:25:18 PM	BCl3 valve closed
2/4/10	3:25:18 PM	PH3 valve closed
2/4/10	3:25:18 PM	SiCl4 pre valve closed
2/4/10	3:25:18 PM	SiCl4 post valve closed
2/4/10	3:25:18 PM	Main Vac valve closed
2/4/10	3:25:18 PM	Bubbler valve closed
2/4/10	3:25:18 PM	Bypass valve opened
2/4/10	3:25:18 PM	Helium MFC set to  0.000000
2/4/10	3:25:18 PM	H2 MFC set to  0.000000
2/4/10	3:25:18 PM	BCl3 MFC set to  0.000000
2/4/10	3:25:18 PM	PHl3 MFC set to  0.000000
2/4/10	3:25:18 PM	SiCl4 MFC set to  0.000000
2/4/10	3:25:18 PM	Bypass solenoid MFC set to  760.000000
2/4/10	3:25:18 PM	Tube furnace set to 0
2/4/10	3:25:34 PM	Baratron reads 76097.791645 Torr.  Emergency exit.
2/4/10	3:25:34 PM	Program exited cleanly
2/4/10	3:25:57 PM	Program started normally
2/4/10	3:25:57 PM	Helium valve closed
2/4/10	3:25:57 PM	H2 valve closed
2/4/10	3:25:57 PM	BCl3 valve closed
2/4/10	3:25:57 PM	PH3 valve closed
2/4/10	3:25:57 PM	SiCl4 pre valve closed
2/4/10	3:25:57 PM	SiCl4 post valve closed
2/4/10	3:25:57 PM	Main Vac valve closed
2/4/10	3:25:57 PM	Bubbler valve closed
2/4/10	3:25:57 PM	Bypass valve opened
2/4/10	3:25:57 PM	Helium MFC set to  0.000000
2/4/10	3:25:57 PM	H2 MFC set to  0.000000
2/4/10	3:25:57 PM	BCl3 MFC set to  0.000000
2/4/10	3:25:57 PM	PHl3 MFC set to  0.000000
2/4/10	3:25:57 PM	SiCl4 MFC set to  0.000000
2/4/10	3:25:57 PM	Bypass solenoid MFC set to  760.000000
2/4/10	3:25:57 PM	Tube furnace set to 0
2/4/10	3:25:59 PM	Baratron reads 76052.356334 Torr.  Emergency exit.
2/4/10	3:25:59 PM	Program exited cleanly
2/4/10	3:26:01 PM	Program started normally
2/4/10	3:26:01 PM	Helium valve closed
2/4/10	3:26:01 PM	H2 valve closed
2/4/10	3:26:02 PM	BCl3 valve closed
2/4/10	3:26:02 PM	PH3 valve closed
2/4/10	3:26:02 PM	SiCl4 pre valve closed
2/4/10	3:26:02 PM	SiCl4 post valve closed
2/4/10	3:26:02 PM	Main Vac valve closed
2/4/10	3:26:02 PM	Bubbler valve closed
2/4/10	3:26:02 PM	Bypass valve opened
2/4/10	3:26:02 PM	Helium MFC set to  0.000000
2/4/10	3:26:02 PM	H2 MFC set to  0.000000
2/4/10	3:26:02 PM	BCl3 MFC set to  0.000000
2/4/10	3:26:02 PM	PHl3 MFC set to  0.000000
2/4/10	3:26:02 PM	SiCl4 MFC set to  0.000000
2/4/10	3:26:02 PM	Bypass solenoid MFC set to  760.000000
2/4/10	3:26:02 PM	Tube furnace set to 0
2/4/10	3:26:06 PM	Baratron reads 76080.044526 Torr.  Emergency exit.
2/4/10	3:26:06 PM	Program exited cleanly
2/4/10	3:26:56 PM	Program started normally
2/4/10	3:27:02 PM	SiCl4 post valve opened
2/4/10	3:27:03 PM	SiCl4 post valve closed
2/4/10	3:27:05 PM	SiCl4 pre valve opened
2/4/10	3:27:06 PM	SiCl4 pre valve closed
2/4/10	3:27:07 PM	Helium valve opened
2/4/10	3:27:08 PM	Helium valve closed
2/4/10	3:27:10 PM	Bypass valve opened
2/4/10	3:27:11 PM	Bypass valve closed
2/4/10	3:27:12 PM	Main Vac valve opened
2/4/10	3:27:12 PM	Main Vac valve closed
2/4/10	3:27:13 PM	Bubbler valve opened
2/4/10	3:27:14 PM	Bubbler valve closed
2/4/10	3:28:00 PM	Program exited cleanly
2/4/10	3:28:39 PM	Program started normally
2/4/10	3:28:46 PM	PHl3 MFC set to  0.000000
2/4/10	3:28:49 PM	Program exited cleanly
2/4/10	3:40:03 PM	Program started normally
2/4/10	3:40:10 PM	PHl3 MFC set to  3.000000
2/4/10	3:40:14 PM	PHl3 MFC set to  3.200000
2/4/10	3:40:32 PM	PHl3 MFC set to  3.100000
2/4/10	3:40:42 PM	PHl3 MFC set to  1.241253
2/4/10	3:40:46 PM	PHl3 MFC set to  1.200000
2/4/10	3:41:00 PM	BCl3 MFC set to  2.000000
2/4/10	3:41:05 PM	H2 MFC set to  500.000000
2/4/10	3:41:09 PM	H2 MFC set to  500.033400
2/4/10	3:41:11 PM	H2 MFC set to  500.000000
2/4/10	3:41:16 PM	SiCl4 MFC set to  32.000000
2/4/10	3:41:20 PM	Helium valve opened
2/4/10	3:41:21 PM	Helium valve closed
2/4/10	3:41:25 PM	SiCl4 post valve opened
2/4/10	3:41:26 PM	SiCl4 post valve closed
2/4/10	3:41:43 PM	Program exited cleanly
2/4/10	3:41:46 PM	Program started normally
2/4/10	3:41:47 PM	H2 valve opened
2/4/10	3:41:50 PM	Program exited cleanly
2/4/10	4:03:40 PM	Program started normally
2/4/10	4:03:41 PM	Helium valve opened
2/4/10	4:03:42 PM	Helium valve closed
2/4/10	4:04:47 PM	Program exited cleanly
2/4/10	4:32:54 PM	Program started normally
2/4/10	4:32:57 PM	Program exited cleanly
2/4/10	7:00:33 PM	Program started normally
2/4/10	7:01:00 PM	Program started after a nonstandard shutdown
2/4/10	7:01:07 PM	Program exited cleanly
2/4/10	7:01:13 PM	Program started normally
2/4/10	7:01:32 PM	Program exited cleanly
2/4/10	7:02:03 PM	Program started normally
2/4/10	7:02:36 PM	Program exited cleanly
2/4/10	7:03:54 PM	Program started normally
2/4/10	7:04:39 PM	Program exited cleanly
2/4/10	7:07:31 PM	Program started normally
2/4/10	7:07:59 PM	Program exited cleanly
2/4/10	7:08:11 PM	Program started normally
2/4/10	7:08:32 PM	Program exited cleanly
2/4/10	7:08:51 PM	Program started normally
2/4/10	7:12:37 PM	Program started after a nonstandard shutdown
2/4/10	8:29:22 PM	Program exited cleanly
2/4/10	8:42:11 PM	Program started normally
2/4/10	8:42:27 PM	Program exited cleanly
2/4/10	8:43:34 PM	Program started normally
2/4/10	8:43:49 PM	PH3 valve opened
2/4/10	8:43:50 PM	PH3 valve closed
2/4/10	8:43:51 PM	BCl3 valve opened
2/4/10	8:43:51 PM	SiCl4 post valve opened
2/4/10	8:43:52 PM	Bubbler valve opened
2/4/10	8:49:47 PM	Program exited cleanly
2/4/10	8:51:49 PM	Program started normally
2/4/10	8:52:21 PM	Program exited cleanly
2/4/10	8:53:59 PM	Program started normally
2/4/10	8:55:15 PM	Program exited cleanly
2/4/10	8:55:20 PM	Program started normally
2/4/10	8:55:42 PM	Program exited cleanly
2/4/10	8:56:08 PM	Program started normally
2/4/10	8:57:51 PM	Program started after a nonstandard shutdown
2/4/10	8:58:03 PM	Program exited cleanly
2/4/10	9:00:35 PM	Program started normally
2/4/10	9:00:48 PM	Program exited cleanly
2/4/10	9:01:58 PM	Program started normally
2/4/10	9:02:31 PM	Program exited cleanly
2/4/10	9:32:06 PM	Program started normally
2/4/10	9:32:40 PM	Program exited cleanly
2/4/10	9:39:52 PM	Program started normally
2/4/10	9:40:00 PM	Program exited cleanly
2/4/10	9:40:09 PM	Program started normally
2/4/10	9:41:40 PM	Program started after a nonstandard shutdown
2/4/10	9:41:52 PM	Program exited cleanly
2/4/10	9:42:53 PM	Program started normally
2/4/10	9:43:01 PM	Program exited cleanly
2/4/10	9:55:06 PM	Program started normally
2/4/10	9:55:27 PM	Program exited cleanly
2/4/10	9:56:41 PM	Program started normally
2/4/10	9:57:09 PM	Program exited cleanly
2/4/10	9:58:05 PM	Program started normally
2/4/10	9:58:57 PM	Program started after a nonstandard shutdown
2/4/10	9:59:02 PM	Program exited cleanly
2/4/10	10:10:40 PM	Program started normally
2/4/10	10:10:48 PM	Program exited cleanly
2/4/10	10:11:00 PM	Program started normally
2/4/10	10:11:02 PM	Bubbler valve opened
2/4/10	10:11:03 PM	Bubbler valve closed
2/4/10	10:11:04 PM	Bypass valve opened
2/4/10	10:11:20 PM	Program exited cleanly
2/4/10	10:12:24 PM	Program started normally
2/4/10	10:12:29 PM	PH3 valve opened
2/4/10	10:12:29 PM	H2 valve opened
2/4/10	10:12:30 PM	SiCl4 post valve opened
2/4/10	10:12:31 PM	Bubbler valve opened
2/4/10	10:13:06 PM	Program exited cleanly
2/4/10	10:13:35 PM	Program started normally
2/4/10	10:13:36 PM	SiCl4 post valve opened
2/4/10	10:13:36 PM	SiCl4 post valve opened
2/4/10	10:13:37 PM	SiCl4 post valve opened
2/4/10	10:13:37 PM	SiCl4 post valve opened
2/4/10	10:13:37 PM	SiCl4 post valve opened
2/4/10	10:13:38 PM	SiCl4 post valve opened
2/4/10	10:13:39 PM	SiCl4 pre valve opened
2/4/10	10:13:39 PM	SiCl4 pre valve closed
2/4/10	10:13:42 PM	Program exited cleanly
2/4/10	10:14:01 PM	Program started normally
2/4/10	10:14:02 PM	SiCl4 post valve opened
2/4/10	10:14:03 PM	SiCl4 post valve closed
2/4/10	10:14:03 PM	SiCl4 post valve opened
2/4/10	10:14:03 PM	SiCl4 post valve closed
2/4/10	10:14:04 PM	Helium valve opened
2/4/10	10:14:05 PM	Helium valve closed
2/4/10	10:14:05 PM	H2 valve opened
2/4/10	10:14:06 PM	H2 valve closed
2/4/10	10:14:06 PM	BCl3 valve opened
2/4/10	10:14:07 PM	BCl3 valve closed
2/4/10	10:14:07 PM	PH3 valve opened
2/4/10	10:14:08 PM	PH3 valve closed
2/4/10	10:14:08 PM	SiCl4 pre valve opened
2/4/10	10:14:09 PM	SiCl4 pre valve closed
2/4/10	10:14:10 PM	Main Vac valve opened
2/4/10	10:14:10 PM	Main Vac valve closed
2/4/10	10:14:10 PM	Bypass valve opened
2/4/10	10:14:11 PM	Bypass valve closed
2/4/10	10:14:11 PM	Bubbler valve opened
2/4/10	10:14:12 PM	Bubbler valve closed
2/4/10	10:14:13 PM	Main Vac valve opened
2/4/10	10:15:27 PM	Program exited cleanly
2/4/10	10:15:29 PM	Program started normally
2/4/10	10:15:36 PM	Program exited cleanly
2/4/10	10:25:07 PM	Program started normally
2/4/10	10:25:09 PM	Helium valve opened
2/4/10	10:25:23 PM	Program exited cleanly
2/4/10	10:44:30 PM	Program started normally
2/4/10	10:44:33 PM	Tube furnace set to 1100
2/4/10	10:44:36 PM	Tube furnace set to 343
2/4/10	10:44:38 PM	Tube furnace set to 1100
2/4/10	10:44:40 PM	Tube furnace set to 333
2/4/10	10:45:01 PM	Program exited cleanly
2/4/10	11:39:00 PM	Program started normally
2/4/10	11:39:04 PM	Program exited cleanly
2/4/10	11:56:04 PM	Program started normally
2/4/10	11:58:20 PM	Recipe started at 11:58 PM
2/4/10	11:58:20 PM	H2 valve closed
2/4/10	11:58:20 PM	BCl3 valve closed
2/4/10	11:58:20 PM	SiCl4 pre valve closed
2/4/10	11:58:20 PM	Main Vac valve closed
2/4/10	11:58:20 PM	Bubbler valve closed
2/4/10	11:58:20 PM	Helium valve opened
2/4/10	11:58:20 PM	PH3 valve opened
2/4/10	11:58:20 PM	SiCl4 post valve opened
2/4/10	11:58:20 PM	Bypass valve opened
2/4/10	11:58:20 PM	Helium MFC set to  0.000000
2/4/10	11:58:20 PM	H2 MFC set to  0.000000
2/4/10	11:58:20 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:20 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:20 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:20 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:20 PM	Tube furnace set to 0
2/4/10	11:58:20 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:20 PM	Helium valve closed
2/4/10	11:58:20 PM	H2 valve closed
2/4/10	11:58:20 PM	BCl3 valve closed
2/4/10	11:58:20 PM	PH3 valve closed
2/4/10	11:58:20 PM	SiCl4 pre valve closed
2/4/10	11:58:20 PM	SiCl4 post valve closed
2/4/10	11:58:20 PM	Main Vac valve closed
2/4/10	11:58:20 PM	Bypass valve closed
2/4/10	11:58:20 PM	Bubbler valve opened
2/4/10	11:58:20 PM	Helium MFC set to  0.000000
2/4/10	11:58:20 PM	H2 MFC set to  0.000000
2/4/10	11:58:20 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:20 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:20 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:20 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:20 PM	Tube furnace set to 0
2/4/10	11:58:20 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:20 PM	Helium valve closed
2/4/10	11:58:20 PM	H2 valve closed
2/4/10	11:58:20 PM	BCl3 valve closed
2/4/10	11:58:20 PM	PH3 valve closed
2/4/10	11:58:20 PM	SiCl4 pre valve closed
2/4/10	11:58:20 PM	SiCl4 post valve closed
2/4/10	11:58:20 PM	Main Vac valve closed
2/4/10	11:58:20 PM	Bypass valve closed
2/4/10	11:58:20 PM	Bubbler valve opened
2/4/10	11:58:20 PM	Helium MFC set to  0.000000
2/4/10	11:58:20 PM	H2 MFC set to  0.000000
2/4/10	11:58:20 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:20 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:20 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:20 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:20 PM	Tube furnace set to 0
2/4/10	11:58:20 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:20 PM	Run finished at 11:58 PM
2/4/10	11:58:27 PM	Recipe started at 11:58 PM
2/4/10	11:58:27 PM	H2 valve closed
2/4/10	11:58:27 PM	BCl3 valve closed
2/4/10	11:58:27 PM	SiCl4 pre valve closed
2/4/10	11:58:27 PM	Main Vac valve closed
2/4/10	11:58:27 PM	Bubbler valve closed
2/4/10	11:58:27 PM	Helium valve opened
2/4/10	11:58:27 PM	PH3 valve opened
2/4/10	11:58:27 PM	SiCl4 post valve opened
2/4/10	11:58:27 PM	Bypass valve opened
2/4/10	11:58:27 PM	Helium MFC set to  0.000000
2/4/10	11:58:27 PM	H2 MFC set to  0.000000
2/4/10	11:58:27 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:27 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:27 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:27 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:27 PM	Tube furnace set to 0
2/4/10	11:58:27 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:27 PM	Helium valve closed
2/4/10	11:58:27 PM	H2 valve closed
2/4/10	11:58:27 PM	BCl3 valve closed
2/4/10	11:58:27 PM	PH3 valve closed
2/4/10	11:58:27 PM	SiCl4 pre valve closed
2/4/10	11:58:27 PM	SiCl4 post valve closed
2/4/10	11:58:27 PM	Main Vac valve closed
2/4/10	11:58:27 PM	Bypass valve closed
2/4/10	11:58:27 PM	Bubbler valve opened
2/4/10	11:58:27 PM	Helium MFC set to  0.000000
2/4/10	11:58:27 PM	H2 MFC set to  0.000000
2/4/10	11:58:27 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:27 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:27 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:27 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:27 PM	Tube furnace set to 0
2/4/10	11:58:27 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:27 PM	Helium valve closed
2/4/10	11:58:27 PM	H2 valve closed
2/4/10	11:58:27 PM	BCl3 valve closed
2/4/10	11:58:27 PM	PH3 valve closed
2/4/10	11:58:27 PM	SiCl4 pre valve closed
2/4/10	11:58:27 PM	SiCl4 post valve closed
2/4/10	11:58:27 PM	Main Vac valve closed
2/4/10	11:58:27 PM	Bypass valve closed
2/4/10	11:58:27 PM	Bubbler valve opened
2/4/10	11:58:27 PM	Helium MFC set to  0.000000
2/4/10	11:58:27 PM	H2 MFC set to  0.000000
2/4/10	11:58:27 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:27 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:27 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:27 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:27 PM	Tube furnace set to 0
2/4/10	11:58:27 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:27 PM	Run finished at 11:58 PM
2/4/10	11:58:29 PM	Recipe started at 11:58 PM
2/4/10	11:58:30 PM	H2 valve closed
2/4/10	11:58:30 PM	BCl3 valve closed
2/4/10	11:58:30 PM	SiCl4 pre valve closed
2/4/10	11:58:30 PM	Main Vac valve closed
2/4/10	11:58:30 PM	Bubbler valve closed
2/4/10	11:58:30 PM	Helium valve opened
2/4/10	11:58:30 PM	PH3 valve opened
2/4/10	11:58:30 PM	SiCl4 post valve opened
2/4/10	11:58:30 PM	Bypass valve opened
2/4/10	11:58:30 PM	Helium MFC set to  0.000000
2/4/10	11:58:30 PM	H2 MFC set to  0.000000
2/4/10	11:58:30 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:30 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:30 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:30 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:30 PM	Tube furnace set to 0
2/4/10	11:58:30 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:30 PM	Helium valve closed
2/4/10	11:58:30 PM	H2 valve closed
2/4/10	11:58:30 PM	BCl3 valve closed
2/4/10	11:58:30 PM	PH3 valve closed
2/4/10	11:58:30 PM	SiCl4 pre valve closed
2/4/10	11:58:30 PM	SiCl4 post valve closed
2/4/10	11:58:30 PM	Main Vac valve closed
2/4/10	11:58:30 PM	Bypass valve closed
2/4/10	11:58:30 PM	Bubbler valve opened
2/4/10	11:58:30 PM	Helium MFC set to  0.000000
2/4/10	11:58:30 PM	H2 MFC set to  0.000000
2/4/10	11:58:30 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:30 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:30 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:30 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:30 PM	Tube furnace set to 0
2/4/10	11:58:30 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:30 PM	Helium valve closed
2/4/10	11:58:30 PM	H2 valve closed
2/4/10	11:58:30 PM	BCl3 valve closed
2/4/10	11:58:30 PM	PH3 valve closed
2/4/10	11:58:30 PM	SiCl4 pre valve closed
2/4/10	11:58:30 PM	SiCl4 post valve closed
2/4/10	11:58:30 PM	Main Vac valve closed
2/4/10	11:58:30 PM	Bypass valve closed
2/4/10	11:58:30 PM	Bubbler valve opened
2/4/10	11:58:30 PM	Helium MFC set to  0.000000
2/4/10	11:58:30 PM	H2 MFC set to  0.000000
2/4/10	11:58:30 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:30 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:30 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:30 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:30 PM	Tube furnace set to 0
2/4/10	11:58:30 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:30 PM	Run finished at 11:58 PM
2/4/10	11:58:35 PM	Bubbler valve closed
2/4/10	11:58:38 PM	Recipe started at 11:58 PM
2/4/10	11:58:38 PM	H2 valve closed
2/4/10	11:58:38 PM	BCl3 valve closed
2/4/10	11:58:38 PM	SiCl4 pre valve closed
2/4/10	11:58:38 PM	Main Vac valve closed
2/4/10	11:58:38 PM	Bubbler valve closed
2/4/10	11:58:38 PM	Helium valve opened
2/4/10	11:58:38 PM	PH3 valve opened
2/4/10	11:58:38 PM	SiCl4 post valve opened
2/4/10	11:58:38 PM	Bypass valve opened
2/4/10	11:58:38 PM	Helium MFC set to  0.000000
2/4/10	11:58:38 PM	H2 MFC set to  0.000000
2/4/10	11:58:38 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:38 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:38 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:38 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:38 PM	Tube furnace set to 0
2/4/10	11:58:38 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:38 PM	Helium valve closed
2/4/10	11:58:38 PM	H2 valve closed
2/4/10	11:58:38 PM	BCl3 valve closed
2/4/10	11:58:38 PM	PH3 valve closed
2/4/10	11:58:38 PM	SiCl4 pre valve closed
2/4/10	11:58:38 PM	SiCl4 post valve closed
2/4/10	11:58:38 PM	Main Vac valve closed
2/4/10	11:58:38 PM	Bypass valve closed
2/4/10	11:58:38 PM	Bubbler valve opened
2/4/10	11:58:38 PM	Helium MFC set to  0.000000
2/4/10	11:58:38 PM	H2 MFC set to  0.000000
2/4/10	11:58:38 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:38 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:38 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:38 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:38 PM	Tube furnace set to 0
2/4/10	11:58:38 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:38 PM	Helium valve closed
2/4/10	11:58:38 PM	H2 valve closed
2/4/10	11:58:38 PM	BCl3 valve closed
2/4/10	11:58:38 PM	PH3 valve closed
2/4/10	11:58:38 PM	SiCl4 pre valve closed
2/4/10	11:58:38 PM	SiCl4 post valve closed
2/4/10	11:58:38 PM	Main Vac valve closed
2/4/10	11:58:38 PM	Bypass valve closed
2/4/10	11:58:38 PM	Bubbler valve opened
2/4/10	11:58:38 PM	Helium MFC set to  0.000000
2/4/10	11:58:38 PM	H2 MFC set to  0.000000
2/4/10	11:58:38 PM	BCl3 MFC set to  0.000000
2/4/10	11:58:38 PM	PHl3 MFC set to  0.000000
2/4/10	11:58:38 PM	SiCl4 MFC set to  0.000000
2/4/10	11:58:38 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:38 PM	Tube furnace set to 0
2/4/10	11:58:38 PM	Bypass solenoid MFC set to  0.000000
2/4/10	11:58:38 PM	Run finished at 11:58 PM
2/4/10	11:58:45 PM	Program exited cleanly
2/4/10	11:59:16 PM	Program started normally
2/4/10	11:59:28 PM	Program exited cleanly
2/4/10	11:59:59 PM	Program started normally
